DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Young-Man | ko |
dc.contributor.author | Lee, Moon G. | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.contributor.author | Jeong, Jaehwa | ko |
dc.date.accessioned | 2010-02-10T05:55:24Z | - |
dc.date.available | 2010-02-10T05:55:24Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | REVIEW OF SCIENTIFIC INSTRUMENTS, v.80, no.4 | - |
dc.identifier.issn | 0034-6748 | - |
dc.identifier.uri | http://hdl.handle.net/10203/16587 | - |
dc.description.abstract | Next-generation lithography requires a high precision stage, which is compatible with a high vacuum condition. A magnetic levitation stage with six degrees-of-freedom is considered state-of-the-art technology for a high vacuum condition. The noncontact characteristic of magnetic levitation enables high precision positioning as well as no particle generation. To position the stage against gravity, z-directional electromagnetic levitation mechanisms are widely used. However, if electromagnetic actuators for levitation are used, heat is inevitably generated, which deforms the structures and degrades accuracy of the stage. Thus, a gravity compensator is required. In this paper, we propose a new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage. The novel Halbach magnetic bearing exerts a force four times larger than a conventional magnetic bearing with the same volume. We also discuss the complementary characteristics of the two magnetic bearings. By modifying the height of the center magnet in a Halbach magnetic bearing, a performance compromise between levitating force density and force uniformity is obtained. The Halbach linear active magnetic bearing can be a good solution for magnetic levitation stages because of its large and uniform levitation force. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | DESIGN | - |
dc.title | A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage | - |
dc.type | Article | - |
dc.identifier.wosid | 000266597100047 | - |
dc.identifier.scopusid | 2-s2.0-65449162312 | - |
dc.type.rims | ART | - |
dc.citation.volume | 80 | - |
dc.citation.issue | 4 | - |
dc.citation.publicationname | REVIEW OF SCIENTIFIC INSTRUMENTS | - |
dc.identifier.doi | 10.1063/1.3116482 | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Lee, Moon G. | - |
dc.contributor.nonIdAuthor | Jeong, Jaehwa | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | electromagnetic actuators | - |
dc.subject.keywordAuthor | magnetic bearings | - |
dc.subject.keywordAuthor | magnetic forces | - |
dc.subject.keywordAuthor | magnetic levitation | - |
dc.subject.keywordAuthor | position control | - |
dc.subject.keywordPlus | DESIGN | - |
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