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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

동일 평면 상의 선충전 전극을 이용하여 동작 전압의 조절이 가능한 정전구동 마이크로 스위치

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양현호 / 최동훈 / 이정언 / 윤준보researcher
Publisher
한국MEMS학술대회
Issue Date
2010-04-01
Language
KOR
Citation

제12회 한국MEMS학술대회, pp.237 - 238

URI
http://hdl.handle.net/10203/165620
Appears in Collection
EE-Conference Papers(학술회의논문)
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