마이크로셔터 디스플레이에 응용 가능한 전압으로 제어되는 신개념 정전구동기A novel voltage-controlled electrostatic actuator applicable to microshutter display

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Publisher
한국MEMS학술대회
Issue Date
2010-04-01
Language
KOR
Citation

제12회 한국MEMS학술대회, pp.223 - 224

URI
http://hdl.handle.net/10203/165616
Appears in Collection
EE-Conference Papers(학술회의논문)
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