나노인덴터를 활용한 RF MEMS 스위치의 신뢰성 평가 연구Characterization of Contact Reliability in RF MEMS Switch Using Nano-Indenter
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김동석 | - |
| dc.contributor.author | 고승덕 | - |
| dc.contributor.author | 이병기 | - |
| dc.contributor.author | 윤준보 | - |
| dc.contributor.author | 김보경 | - |
| dc.date.accessioned | 2013-03-28T12:11:19Z | - |
| dc.date.available | 2013-03-28T12:11:19Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010-04-01 | - |
| dc.identifier.citation | 제12회 한국MEMS학술대회, v., no., pp.245 - 246 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/165588 | - |
| dc.language | KOR | - |
| dc.publisher | 한국MEMS학술대회 | - |
| dc.title | 나노인덴터를 활용한 RF MEMS 스위치의 신뢰성 평가 연구 | - |
| dc.title.alternative | Characterization of Contact Reliability in RF MEMS Switch Using Nano-Indenter | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 245 | - |
| dc.citation.endingpage | 246 | - |
| dc.citation.publicationname | 제12회 한국MEMS학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 윤준보 | - |
| dc.contributor.nonIdAuthor | 김동석 | - |
| dc.contributor.nonIdAuthor | 고승덕 | - |
| dc.contributor.nonIdAuthor | 이병기 | - |
| dc.contributor.nonIdAuthor | 김보경 | - |
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