나노인덴터를 활용한 RF MEMS 스위치의 신뢰성 평가 연구Characterization of Contact Reliability in RF MEMS Switch Using Nano-Indenter

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Publisher
한국MEMS학술대회
Issue Date
2010-04-01
Language
KOR
Citation

제12회 한국MEMS학술대회, pp.245 - 246

URI
http://hdl.handle.net/10203/165588
Appears in Collection
EE-Conference Papers(학술회의논문)
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