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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Study of a new spring structure for a mechanically reliable micromirror

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dc.contributor.authorKim, D.-H.ko
dc.contributor.authorKim, M.-W.ko
dc.contributor.authorJeon, J.-W.ko
dc.contributor.authorLim, K.S.ko
dc.contributor.authorYoon, Jun-Boko
dc.date.accessioned2013-03-28T12:06:04Z-
dc.date.available2013-03-28T12:06:04Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-01-24-
dc.identifier.citation23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.815 - 818-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10203/165557-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleStudy of a new spring structure for a mechanically reliable micromirror-
dc.typeConference-
dc.identifier.wosid000278416400202-
dc.identifier.scopusid2-s2.0-77952750809-
dc.type.rimsCONF-
dc.citation.beginningpage815-
dc.citation.endingpage818-
dc.citation.publicationname23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010-
dc.identifier.conferencecountryHK-
dc.identifier.conferencelocationHong Kong-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorKim, D.-H.-
dc.contributor.nonIdAuthorKim, M.-W.-
dc.contributor.nonIdAuthorJeon, J.-W.-
dc.contributor.nonIdAuthorLim, K.S.-
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EE-Conference Papers(학술회의논문)
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