DSpace at KOASAS: Analysis of circular cluster tools: Transient behavior and semiconductor equipment models

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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Analysis of circular cluster tools: Transient behavior and semiconductor equipment models

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Ahn, Young-hun / Morrison, James R researcher

Publisher: CASE

Issue Date: 2010-08-21

Language: ENG

Citation: 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010, pp.39 - 44

URI: http://hdl.handle.net/10203/165133

Appears in Collection: IE-Conference Papers(학술회의논문)

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