Improved Top Surface Imaging Process for High Aspect Ratio Patterns
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-28T10:56:33Z | - |
| dc.date.available | 2013-03-28T10:56:33Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010-01-24 | - |
| dc.identifier.citation | Advanced Polymeric Material and Thechnology Symposium, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/165073 | - |
| dc.language | ENG | - |
| dc.title | Improved Top Surface Imaging Process for High Aspect Ratio Patterns | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Advanced Polymeric Material and Thechnology Symposium | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
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