DSpace at KOASAS
College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays

Cited 6 time in webofscience Cited 0 time in scopus
  • Hit : 376
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorLee, D.ko
dc.contributor.authorLee, W.S.ko
dc.contributor.authorProvin, e J.ko
dc.contributor.authorLee, J.-O.ko
dc.contributor.authorYoon, Jun-Boko
dc.contributor.authorHowe, R.T.ko
dc.contributor.authorMitra, S.ko
dc.contributor.authorWong, H.-S.P.ko
dc.date.accessioned2013-03-28T10:26:29Z-
dc.date.available2013-03-28T10:26:29Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-01-24-
dc.identifier.citation23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.456 - 459-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10203/164878-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleTitanium nitride sidewall stringer process for lateral nanoelectromechanical relays-
dc.typeConference-
dc.identifier.wosid000278416400112-
dc.identifier.scopusid2-s2.0-77952748531-
dc.type.rimsCONF-
dc.citation.beginningpage456-
dc.citation.endingpage459-
dc.citation.publicationname23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010-
dc.identifier.conferencecountryCC-
dc.identifier.conferencelocationHong Kong-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorLee, D.-
dc.contributor.nonIdAuthorLee, W.S.-
dc.contributor.nonIdAuthorProvin, e J.-
dc.contributor.nonIdAuthorLee, J.-O.-
dc.contributor.nonIdAuthorHowe, R.T.-
dc.contributor.nonIdAuthorMitra, S.-
dc.contributor.nonIdAuthorWong, H.-S.P.-
Appears in Collection
EE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 6 items in WoS Click to see citing articles in records_button

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0