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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Effect of substrate temperature on the magnetic tunnel junction material etching using inductively coupled CH3OH plasma

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Lee M.S. / Cho S.H. / Jung B.K. / Shin C.H. / Choi M.K. / Song K.J. / Roh J.S. / Park S.K. / Lee, Won-Jongresearcher
Issue Date
2010-10-10
Language
ENG
Citation

218th ECS Meeting, pp.2027 -

URI
http://hdl.handle.net/10203/164549
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MS-Conference Papers(학술회의논문)
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