DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ganesan, Ramakrishnan | - |
dc.contributor.author | Youn, Seul Ki | - |
dc.contributor.author | Yun, Jei Moon | - |
dc.contributor.author | Kim, Jin-Baek | - |
dc.date.accessioned | 2013-03-28T06:27:08Z | - |
dc.date.available | 2013-03-28T06:27:08Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-01-21 | - |
dc.identifier.citation | 24th European Mask and Lithography Conference, EMLC 2008, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/163483 | - |
dc.language | ENG | - |
dc.title | Top surface imaging study by selective chemisorptions of poly(dimethyl siloxane) on diazoketo-functionalized polymeric surface | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-44949089446 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 24th European Mask and Lithography Conference, EMLC 2008 | - |
dc.identifier.conferencecountry | Germany | - |
dc.identifier.conferencecountry | Germany | - |
dc.contributor.localauthor | Yun, Jei Moon | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.contributor.nonIdAuthor | Ganesan, Ramakrishnan | - |
dc.contributor.nonIdAuthor | Youn, Seul Ki | - |
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