A micro 3D-PTV system is constructed using single camera system. Two viewing holes
have been installed just behind the object lens of the microscopic system to construct a stereoscopic
viewing. The system consists of one high-definition camera (1028 x 1024 pixel, 500fps), an Ar-ion laser, a
plate of two-viewing holes and the host computer. A hybrid genetic algorithm (GA) has been used to find
out the same image pairs. In the genetic algorithm, crossover operation, mutation operation and
reproduction operation were introduced while changing the percentile values of these three values for
finding the most optimal pairing conditions. An epipolar concept has been adopted to eliminate spurious
candidates that cannot be regarded as the same particle pairs. The measurement errors in camera
calibration for X, Y and Z coordinates were 0.083μm, 0.045μm and 0.083μm, respectively. The
constructed measurement system has been used for measuring a micro backward facing step channel (H x
h x W: 36μm x 70μm x 3000μm). Reynolds