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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Fabrication and characterization of SiOx/Parylene and SiNx/Parylene thin film encapsulation layers

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Kim N. / Potscavage, W. / Kippelen, B. / Yoo, Seunghyupresearcher / Domercq, B. / Graham, S.
Issue Date
2007-07-08
Language
ENG
Citation

ASME Electronic and Photonics Packaging Division, pp.933 - 938

URI
http://hdl.handle.net/10203/161470
Appears in Collection
EE-Conference Papers(학술회의논문)
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