반사광측정법을 이용한 박막의 두께 및 굴절률 측정방법Simultaneous measurements of refractive index and thickness of a thin-film layer using reflectometry

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Publisher
한국정밀공학회
Issue Date
2008-11-13
Language
KOR
Citation

한국정밀공학회 2008년도 추계학술대회 , v.8, pp.109 - 110

URI
http://hdl.handle.net/10203/161119
Appears in Collection
ME-Conference Papers(학술회의논문)
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