Characterizatoin of nano-grained ZnO piezoelectric thin films deposited under various sputtering conditions

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Publisher
한국해양정보통신학회
Issue Date
2009-05
Language
KOR
Citation

한국해양정보통신학회 추계종합학술대회, pp.428 - 430

URI
http://hdl.handle.net/10203/161063
Appears in Collection
EE-Conference Papers(학술회의논문)
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