DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Byung Jin | - |
dc.contributor.author | He, W | - |
dc.contributor.author | Kim, SJ | - |
dc.contributor.author | Kim, YS | - |
dc.date.accessioned | 2013-03-27T02:55:39Z | - |
dc.date.available | 2013-03-27T02:55:39Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-03-26 | - |
dc.identifier.citation | Material Research Society 2008 Spring Meeting, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/158440 | - |
dc.language | ENG | - |
dc.title | Electrical and Physical Properties of ALD HfLaO for CMOS Device Application | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Material Research Society 2008 Spring Meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | He, W | - |
dc.contributor.nonIdAuthor | Kim, SJ | - |
dc.contributor.nonIdAuthor | Kim, YS | - |
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