In-channel particle position and velocity detectors based on particle transit time across uneven inter-gap electrodes

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Publisher
123
Issue Date
2007-01-21
Language
English
Citation

20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, pp.485 - 488

ISSN
1084-6999
URI
http://hdl.handle.net/10203/157382
Appears in Collection
BiS-Conference Papers(학술회의논문)
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