Electron temperature and density variation due to temporal evolution of nano particle growth in RE silane plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chai, KB | ko |
| dc.contributor.author | Seon, CR | ko |
| dc.contributor.author | Choe, Wonho | ko |
| dc.contributor.author | Park, S | ko |
| dc.contributor.author | Chung, CW | ko |
| dc.date.accessioned | 2013-03-26T23:19:50Z | - |
| dc.date.available | 2013-03-26T23:19:50Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2008-05-18 | - |
| dc.identifier.citation | 5th International Conference on the Physics of Dusty Plasmas, pp.175 - 176 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/157061 | - |
| dc.language | English | - |
| dc.publisher | 123 | - |
| dc.title | Electron temperature and density variation due to temporal evolution of nano particle growth in RE silane plasma | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000259440600046 | - |
| dc.identifier.scopusid | 2-s2.0-54049144688 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 175 | - |
| dc.citation.endingpage | 176 | - |
| dc.citation.publicationname | 5th International Conference on the Physics of Dusty Plasmas | - |
| dc.identifier.conferencecountry | PO | - |
| dc.identifier.conferencelocation | Ponta Delgada, Azores | - |
| dc.contributor.localauthor | Choe, Wonho | - |
| dc.contributor.nonIdAuthor | Chai, KB | - |
| dc.contributor.nonIdAuthor | Seon, CR | - |
| dc.contributor.nonIdAuthor | Park, S | - |
| dc.contributor.nonIdAuthor | Chung, CW | - |
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- NE-Conference Papers(학술회의논문)
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