Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Joo W.-D. | ko |
| dc.contributor.author | You J. | ko |
| dc.contributor.author | Ghim Y.-S. | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.date.accessioned | 2013-03-26T01:38:32Z | - |
| dc.date.available | 2013-03-26T01:38:32Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2008-08-11 | - |
| dc.identifier.citation | Interferometry XIV: Techniques and Analysis | - |
| dc.identifier.uri | http://hdl.handle.net/10203/156833 | - |
| dc.language | English | - |
| dc.publisher | 123 | - |
| dc.title | Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000262082100025 | - |
| dc.identifier.scopusid | 2-s2.0-52249118096 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Interferometry XIV: Techniques and Analysis | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Diego, CA | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Joo W.-D. | - |
| dc.contributor.nonIdAuthor | You J. | - |
| dc.contributor.nonIdAuthor | Ghim Y.-S. | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
This item is cited by other documents in WoS
| ⊙ Detail Information in WoSⓡ | Click to see |  |
| ⊙ Cited 5 items in WoS | Click to see citing articles in |  |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.