High-precision micromechanical tunable capacitors using parallel-interconnected digital actuators

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dc.contributor.authorHan, Wko
dc.contributor.authorCho, Young-Hoko
dc.date.accessioned2013-03-26T01:10:34Z-
dc.date.available2013-03-26T01:10:34Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2007-01-21-
dc.identifier.citation20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, pp.815 - 818-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10203/156653-
dc.languageEnglish-
dc.publisher123-
dc.titleHigh-precision micromechanical tunable capacitors using parallel-interconnected digital actuators-
dc.typeConference-
dc.identifier.wosid000255867800218-
dc.identifier.scopusid2-s2.0-52249084936-
dc.type.rimsCONF-
dc.citation.beginningpage815-
dc.citation.endingpage818-
dc.citation.publicationname20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007-
dc.identifier.conferencecountryJA-
dc.identifier.conferencelocationKobe-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorHan, W-
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BiS-Conference Papers(학술회의논문)
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