ALD based metal-insulator-metal (MIM) nanocapacitors for energy storage

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Issue Date
2009-10-05
Language
ENG
Citation

5th Symposium on Atomic Layer Deposition - 216th Meeting of the Electrochemical Society, v.25, pp.345 - 353

URI
http://hdl.handle.net/10203/156507
Appears in Collection
NE-Conference Papers(학술회의논문)
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