Improvement of Resonance Characteristics by Two-Step Thermal Annealing in ZnO-based FBAR Devices
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, Giwan | - |
| dc.contributor.author | Linh, Mai | - |
| dc.contributor.author | Lee, Jae-young | - |
| dc.contributor.author | Pham, Van-Su | - |
| dc.date.accessioned | 2013-03-26T00:27:56Z | - |
| dc.date.available | 2013-03-26T00:27:56Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007-07 | - |
| dc.identifier.citation | ITC-CSCC, v., no., pp.494 - 495 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/156390 | - |
| dc.language | ENG | - |
| dc.title | Improvement of Resonance Characteristics by Two-Step Thermal Annealing in ZnO-based FBAR Devices | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 494 | - |
| dc.citation.endingpage | 495 | - |
| dc.citation.publicationname | ITC-CSCC | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Yoon, Giwan | - |
| dc.contributor.nonIdAuthor | Linh, Mai | - |
| dc.contributor.nonIdAuthor | Lee, Jae-young | - |
| dc.contributor.nonIdAuthor | Pham, Van-Su | - |
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