X-선 리소그래피공정의 무기물 입도에 따른 격벽 형상정밀도 특성Shape Accuracy Improvement of barrier ribs using Sub-micron Inorganic Powder in X-ray lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 류승민 | - |
| dc.contributor.author | 김동주 | - |
| dc.contributor.author | 한만희 | - |
| dc.contributor.author | 양동열 | - |
| dc.contributor.author | 이승섭 | - |
| dc.contributor.author | 박이순 | - |
| dc.date.accessioned | 2013-03-19T02:59:10Z | - |
| dc.date.available | 2013-03-19T02:59:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | 한국정밀공학회 2007년도 춘계학술대회 , v., no., pp.183 - 184 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/155105 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | X-선 리소그래피공정의 무기물 입도에 따른 격벽 형상정밀도 특성 | - |
| dc.title.alternative | Shape Accuracy Improvement of barrier ribs using Sub-micron Inorganic Powder in X-ray lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 183 | - |
| dc.citation.endingpage | 184 | - |
| dc.citation.publicationname | 한국정밀공학회 2007년도 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 양동열 | - |
| dc.contributor.localauthor | 이승섭 | - |
| dc.contributor.nonIdAuthor | 류승민 | - |
| dc.contributor.nonIdAuthor | 김동주 | - |
| dc.contributor.nonIdAuthor | 한만희 | - |
| dc.contributor.nonIdAuthor | 박이순 | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.