현상공정에서 표면장력에 의한 극미세 3 차원 구조물의 변형거동 분석 및 저감방안에 관한 연구Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process

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Dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing materials. The pattern collapse is a very serious problem in microfabrication, because it is one of the factors which limit the device dimensions. The reasons for the pattern collapse are known as the surface tension of rinse liquid, centrifugal force and rinse liquid flow produced in the developing process. In this work, we tried to evaluate the pattern collapse of three-dimensional microstructures that were fabricated by two-photon induced photopolymerization, and showed the way how to reduce the deformation of microstructures.
Publisher
대한기계학회
Issue Date
2008-04
Keywords

이광자 광중합; 3 차원 패턴붕괴; 3 차원 형상; 표면장력

Citation

대한기계학회 논문집 A권, Vol.32, No.4, pp.303-309

DOI
10.3795/KSME-A.2008.32.4.303
URI
http://hdl.handle.net/10203/15499
Link
http://www.ksme.or.kr/
Appears in Collection
ME-Journal Papers(저널논문)

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