Micromechanical active amplifiers using the mechanical resonance modulated by variable stiffness springs

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Issue Date
2007-01-21
Language
ENG
Citation

20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, pp.671 - 674

ISSN
1084-6999
URI
http://hdl.handle.net/10203/154660
Appears in Collection
BiS-Conference Papers(학술회의논문)
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