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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

MEMS variable capacitor actuated with an electrically floating plate

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dc.contributor.authorLee, HS-
dc.contributor.authorYoon, YJ-
dc.contributor.authorChoi, DH-
dc.contributor.authorYoon, Jun-Bo-
dc.date.accessioned2013-03-19T01:52:38Z-
dc.date.available2013-03-19T01:52:38Z-
dc.date.created2012-02-06-
dc.date.issued2007-12-10-
dc.identifier.citation2007 IEEE International Electron Devices Meeting, IEDM, v., no., pp.431 - 434-
dc.identifier.issn0163-1918-
dc.identifier.urihttp://hdl.handle.net/10203/154657-
dc.languageENG-
dc.titleMEMS variable capacitor actuated with an electrically floating plate-
dc.typeConference-
dc.identifier.scopusid2-s2.0-50249121948-
dc.type.rimsCONF-
dc.citation.beginningpage431-
dc.citation.endingpage434-
dc.citation.publicationname2007 IEEE International Electron Devices Meeting, IEDM-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorLee, HS-
dc.contributor.nonIdAuthorYoon, YJ-
dc.contributor.nonIdAuthorChoi, DH-
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EE-Conference Papers(학술회의논문)
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