Thermal Annealing 효과에 의한 다층박막 FBAR 소자의 공진특성개선
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤기완 | - |
| dc.contributor.author | 김동현 | - |
| dc.contributor.author | 임문혁 | - |
| dc.contributor.author | Linh, Mai | - |
| dc.date.accessioned | 2013-03-18T23:10:36Z | - |
| dc.date.available | 2013-03-18T23:10:36Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-10 | - |
| dc.identifier.citation | 한국해양정보통신학회추계학술대회, v., no., pp.633 - 636 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/153464 | - |
| dc.language | KOR | - |
| dc.publisher | 한국해양정보통신학회 | - |
| dc.title | Thermal Annealing 효과에 의한 다층박막 FBAR 소자의 공진특성개선 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 633 | - |
| dc.citation.endingpage | 636 | - |
| dc.citation.publicationname | 한국해양정보통신학회추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 윤기완 | - |
| dc.contributor.nonIdAuthor | 김동현 | - |
| dc.contributor.nonIdAuthor | 임문혁 | - |
| dc.contributor.nonIdAuthor | Linh, Mai | - |
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- EE-Conference Papers(학술회의논문)
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