공기 베어링의 능동제어에 관한 연구

Abstract

In this paper actively controlled air bearing is investigated to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled air beairng is composed of an air bearing, a gap sensor, a controller, and a piezo actuator. By controlling the position of air bearing with piezo actuator, the position of floating object is controlled. In this study the proportional-Integral-Derivative controller is employed. Active air bearing is investigated numerically and experimentally. There is good agreement between the simulation and the experimental results. It is shown that the stiffness and damping characteristics and positioning experimental results. It is shown that the stiffness and damping characteristics and positioning accuracy of air bearing can be improved by means of adopting actively controlled air bearing.