Experimental Study of the Shrinkage Ratio of PDMS Its Alignment for the Wafer Level Process

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Issue Date
2006-11
Language
ENG
Citation

10th Inte. Conf. on Miniaturized Systems for Chemistry and Life Sciences (micro-TAS’06)

URI
http://hdl.handle.net/10203/152544
Appears in Collection
ME-Conference Papers(학술회의논문)
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