미세접촉인쇄기법을 이용한 다기능성 자기조립막 제작과 전자생물소자로의 응용Fabrication of Multi-functional Self-Assembled Monolayers by Microcontact Printing and Their Application for Electronic and Biological Devices
In this work, we fabricated various 2D metallic and polymeric nanopatterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (μ P) based on soft lithography. Silicon masters for the micromolding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. Finally, monodisperse metal or polymer particles could be obtained in the prepared pattern for the application of electronic devices.