백색광 주사 간섭계에서 편광을 고려한 반사시 위상 변화Phase change on reflection considered of the polarization in white-light interferometer

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The phase change upon reflection from target surfaces in white-light interferometer induces measurement errors when target surfaces are composed of dissimilar materials. We prove that this phase change on reflection considered of the polarization of the white-light causes the shift of both envelope peak position and fringe peak position of several tens of nanometer. In addition, we propose a new equation of white-light interference fringe pertinent to the polarization of source.
Publisher
한국정밀공학회
Issue Date
2003-02
Language
KOR
Citation

한국정밀공학회 2003년도 춘계학술대회 , pp.276 - 279

URI
http://hdl.handle.net/10203/152453
Appears in Collection
ME-Conference Papers(학술회의논문)
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