DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김영식 | - |
dc.contributor.author | 김승우 | - |
dc.date.accessioned | 2013-03-18T20:53:21Z | - |
dc.date.available | 2013-03-18T20:53:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-06 | - |
dc.identifier.citation | 한국정밀공학회 2005년 춘계학술대회 , v.5, no., pp.565 - 568 | - |
dc.identifier.uri | http://hdl.handle.net/10203/152343 | - |
dc.description.abstract | We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology. | - |
dc.language | KOR | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 편광 분리 분산형 백색광 간섭계를 이용한 박막 두께 형상 측정법 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.volume | 5 | - |
dc.citation.beginningpage | 565 | - |
dc.citation.endingpage | 568 | - |
dc.citation.publicationname | 한국정밀공학회 2005년 춘계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 김영식 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.