원자간력 현미경(AFM)과 펨토초 펄스 레이저를 이용한 나노 형상 가공AFM-based nanofabrication with Femtosecond pulse laser radiation

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 364
  • Download : 0
We describe a novel method of scanning probe nanofabrication using a AFM(atomic force microscopy) tip with assistance of Femtosecond laser pulses to enhance fabrication capability. Illumination of the AFM tip with ultra-short light pulses induces a strong electric field between the tip and the metal surface, which allows removing metal atoms from the surface by means of field evaporation. Quantum simulation reveals that the field evaporation is triggered even en air when the induced electric field reaches the level of a few volts per angstrom, which is low enough to avoid unwanted thermal damages on most metal surfaces. For experimental validation, a Ti: sapphire Femtosecond pulse laser with 10 fs pulse duration at 800 nm center wavelength was used with a tip coated with gold to fabricate nanostructures on a thin film gold surface. Experimental results demonstrate that fine structures with critical dimensions less than ${\sim}10nm$ can be successfully made with precise control of the repetition rate of Femtosecond laser pulses.
Publisher
한국정밀공학회
Issue Date
2006-05
Language
KOR
Citation

한국정밀공학회 2006년 춘계학술대회, v.6, pp.149 - 150

URI
http://hdl.handle.net/10203/152327
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0