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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

The Design of High Precision X-Y-Theta Stage Using VCM

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dc.contributor.authorKim, D-
dc.contributor.authorKim, K-
dc.contributor.authorGweon, Dae-Gab-
dc.contributor.authorLee, SW-
dc.contributor.authorChoi, Wo-
dc.date.accessioned2013-03-18T20:37:11Z-
dc.date.available2013-03-18T20:37:11Z-
dc.date.created2012-02-06-
dc.date.issued2004-05-31-
dc.identifier.citationEUspen 4th international conference, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/152231-
dc.languageENG-
dc.titleThe Design of High Precision X-Y-Theta Stage Using VCM-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameEUspen 4th international conference-
dc.identifier.conferencecountryUnited Kingdom-
dc.identifier.conferencecountryUnited Kingdom-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorKim, D-
dc.contributor.nonIdAuthorKim, K-
dc.contributor.nonIdAuthorLee, SW-
dc.contributor.nonIdAuthorChoi, Wo-
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ME-Conference Papers(학술회의논문)
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