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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

분리된 압전 구동기에 의한 저전압 대회전각 미소거울

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김성진 / 진영현 / 조영호researcher / 남효진 / 부종욱
Issue Date
2003-05-15
Language
KOR
Citation

제5회 MEMS 학술대회, pp.249 - 254

URI
http://hdl.handle.net/10203/151753
Appears in Collection
BiS-Conference Papers(학술회의논문)
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