Simultaneous Measurement and Compensation of 5-DOF Motion Errors Using Extended Twyman-Green Interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Oh, JS | - |
| dc.contributor.author | Bae, ED | - |
| dc.contributor.author | Kim, Seung-Woo | - |
| dc.date.accessioned | 2013-03-18T19:31:14Z | - |
| dc.date.available | 2013-03-18T19:31:14Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-05-06 | - |
| dc.identifier.citation | EUSPEN, v., no., pp.314 - 315 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/151725 | - |
| dc.language | ENG | - |
| dc.title | Simultaneous Measurement and Compensation of 5-DOF Motion Errors Using Extended Twyman-Green Interferometry | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 314 | - |
| dc.citation.endingpage | 315 | - |
| dc.citation.publicationname | EUSPEN | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Oh, JS | - |
| dc.contributor.nonIdAuthor | Bae, ED | - |
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