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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Fabrication of 3D Microstructures with Inclined/Rotated UV Lithography

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Han, MH / Lee, Seung Seobresearcher
Issue Date
2003
Language
ENG
Citation

16th IEEE Int. Conf. Micro Electro Mechanical System (MEMS’03)

URI
http://hdl.handle.net/10203/151590
Appears in Collection
ME-Conference Papers(학술회의논문)
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