Compensation of Parasitic Motion Errors in Translational Stage Based on Twyman-Green Interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Oh, JS | - |
| dc.contributor.author | Bae, ED | - |
| dc.contributor.author | Kim, Seung-Woo | - |
| dc.date.accessioned | 2013-03-18T18:44:27Z | - |
| dc.date.available | 2013-03-18T18:44:27Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-06 | - |
| dc.identifier.citation | JSPE, v., no., pp.433 - 434 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/151316 | - |
| dc.language | ENG | - |
| dc.title | Compensation of Parasitic Motion Errors in Translational Stage Based on Twyman-Green Interferometry | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 433 | - |
| dc.citation.endingpage | 434 | - |
| dc.citation.publicationname | JSPE | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Oh, JS | - |
| dc.contributor.nonIdAuthor | Bae, ED | - |
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