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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility

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dc.contributor.authorChoi, So-Young-
dc.contributor.authorJoo, Byung-Jun-
dc.contributor.authorKim, Yeong-Dae-
dc.date.accessioned2013-03-18T18:29:10Z-
dc.date.available2013-03-18T18:29:10Z-
dc.date.created2012-02-06-
dc.date.issued2005-
dc.identifier.citationInternational Conference on Modeling and Analysis of Semiconductor Manufacturing, v., no., pp.28 - 33-
dc.identifier.urihttp://hdl.handle.net/10203/151211-
dc.languageENG-
dc.titleScheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage28-
dc.citation.endingpage33-
dc.citation.publicationnameInternational Conference on Modeling and Analysis of Semiconductor Manufacturing-
dc.identifier.conferencecountrySingapore-
dc.identifier.conferencecountrySingapore-
dc.contributor.localauthorKim, Yeong-Dae-
dc.contributor.nonIdAuthorChoi, So-Young-
dc.contributor.nonIdAuthorJoo, Byung-Jun-
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IE-Conference Papers(학술회의논문)
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