DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, So-Young | - |
dc.contributor.author | Joo, Byung-Jun | - |
dc.contributor.author | Kim, Yeong-Dae | - |
dc.date.accessioned | 2013-03-18T18:29:10Z | - |
dc.date.available | 2013-03-18T18:29:10Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005 | - |
dc.identifier.citation | International Conference on Modeling and Analysis of Semiconductor Manufacturing, v., no., pp.28 - 33 | - |
dc.identifier.uri | http://hdl.handle.net/10203/151211 | - |
dc.language | ENG | - |
dc.title | Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 28 | - |
dc.citation.endingpage | 33 | - |
dc.citation.publicationname | International Conference on Modeling and Analysis of Semiconductor Manufacturing | - |
dc.identifier.conferencecountry | Singapore | - |
dc.identifier.conferencecountry | Singapore | - |
dc.contributor.localauthor | Kim, Yeong-Dae | - |
dc.contributor.nonIdAuthor | Choi, So-Young | - |
dc.contributor.nonIdAuthor | Joo, Byung-Jun | - |
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