Synthesis of Methacrylate-based Polymers with Ethyl-4-Methyl-2-Diazo-3-Oxo-Pentenoate and their Application as DUV Resists
- Publisher
- 한국고분자학회
- Issue Date
- 2004-04
- Language
- ENG
- Citation
한국고분자학회 2004년 춘계학술대회, v.29, no.1, pp.208 -
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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