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Deterministic Flow Lines With Applications Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.7, pp.228 - 239, 2010-04 |
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01 |
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