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Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules Kim, Hyunjung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.2, pp.898 - 907, 2019-04 |
Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With Parallel Processing Modules Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.14, no.4, pp.1622 - 1633, 2017-10 |
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07 |
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