Showing results 1 to 4 of 4
A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints Lim, Yuchul; Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.392 - 405, 2019-01 |
(A) new class of sequences that minimizes work cycle interferences for cluster tools with wafer delay constraints = 웨이퍼 지연제약조건을 고려한 클러스터 장비에서 작업주기 내 간섭을 최소화하는 로봇작업순서link Lim, Yuchul; Lee, Tae Eog; et al, 한국과학기술원, 2018 |
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01 |
Efficient Scheduling of Inline Cluster Tools by Decomposition Method Lim, Yuchul; Lee, Tae-Eog, 20th Conference of the International Federation of Operational Research Societies, IFORS, 2014-07-15 |
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