Showing results 1 to 4 of 4
A multiresolution simulation system and simulation development processes Jee, Young-Jun; Lee, Tae-Gyung; Park, Sang-Ho; Cho, Jun-Ho; Kim, Hee-Soo; Lee, Tae-Eog, JOURNAL OF DEFENSE MODELING AND SIMULATION-APPLICATIONS METHODOLOGY TECHNOLOGY-JDMS, v.19, no.3, pp.325 - 338, 2022-07 |
Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07 |
K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05 |
Scheduling of cluster tools with k-periodic chamber cleaning operationslink Lee, Tae-Gyung; Lee, Tae-Eog; et al, 2021 |
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