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Cyclic Scheduling of Cluster Tools with Non-Identical Chamber Access Times Kim, Dae-Kyu; Jung, Chihyun; Lee, Tae-Eog; Jung, Yu-Ju, 2011 Winter Simulation Conference/Modeling and Analysis of Semiconductor Manufacturing, pp.2073 - 2084, WSC, 2011-12-14 |
Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08 |
병렬 챔버간 이송시간이 다른 한팔 클러스터 장비의 주기적 스케줄링 = Cyclic scheduling of single-armed cluster tools with different wafer transport times between parallel chamberslink 정유주; Jung, Yu-Ju; et al, 한국과학기술원, 2009 |
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