Showing results 4 to 8 of 8
Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net Kim, JH; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07 |
Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation Kim, Tae-Kyu; Jung, Chihyun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.10, pp.2785 - 2795, 2012 |
Token Delays and Generalized Workload Balancing for Timed Event Graphs with Application to Cluster Tool Lee, Tae-Eog; Lee, Hwan-Yong; Sreenivas, Ramavarapu S., Proceeding of the 2006 IEEE Cinference on Automation Science and Engineering, pp.93-99, 2006 |
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 |
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07 |
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