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Modeling the manufacturing performance of semiconductor equipment with deep and recurrent neural networks = 심층 및 회귀 인공신경망을 이용한 반도체 장비의 제조 성능 모델링link Park, Se-Hyeon; Park, Jinkyoo; et al, 한국과학기술원, 2020 |
On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools Kim, Hyeong-Ook; Park, Se-Hyeon; Park, Jung Yeon; Morrison, James R, 2019 Winter Simulation Conference, WSC 2019, pp.2224 - 2235, Institute of Electrical and Electronics Engineers Inc., 2019-12 |
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