Showing results 3 to 4 of 4
Models of Clustered Photolithography Tools for Fab-Level Simulation: From Affine to Flow Line Park, Jung Yeon; Park, Kyungsu; Morrison, James R., IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.30, no.4, pp.547 - 558, 2017-11 |
On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools Kim, Hyeong-Ook; Park, Se-Hyeon; Park, Jung Yeon; Morrison, James R, 2019 Winter Simulation Conference, WSC 2019, pp.2224 - 2235, Institute of Electrical and Electronics Engineers Inc., 2019-12 |
Discover