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Change point detection for pumping line balance of deposition equipment. Ahn, Jeongsun; Kim, Duyeon; Song, Mingi; Min, Jaehong; Hwang, Jimin; Kwon, Juhye; Kim, Hyunjung, IEEE International Conference on Automation Science and Engineering, IEEE Robotics and Automation Society, 2021-08-25 |
l1 Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment Ahn, Jeongsun; Kim, Duyeon; Song, Mingi; Min, Jaehong; Hwang, Jimin; Kwon, Juhye; Kim, Hyun-Jung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.1, pp.137 - 145, 2022-02 |
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