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Evaluation of equipment models of clustered photolithography tools for semiconductor fab simulation = 반도체 팹 시뮬레이션을 위한 클러스터 포토리소그래피 장비의 모델 평가link Park, Jung Yeon; 박중연; et al, 한국과학기술원, 2016 |
Models of Clustered Photolithography Tools for Fab-Level Simulation: From Affine to Flow Line Park, Jung Yeon; Park, Kyungsu; Morrison, James R., IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.30, no.4, pp.547 - 558, 2017-11 |
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